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SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME

2025-06-18 03:334160下载
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A semiconductor structure and a method for forming the same are provided. The semiconductor structure comprises : a semiconductor substrate; a rare earth oxide layer formed on the semiconductor substrate; a channel region formed on the rare earth oxide layer; and a source region and a drain region formed at both sides of the channel region respectively, in which a relationship between a lattice constant a of the rare earth oxide layer and a lattice constant b of a semiconductor material of the channel region and/or the source region and the drain region is a=(n±c)b, where n is an integer, c is a mismatch ratio of lattice constants, and 0
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