COMPOSITE CERAMIC, AND CONSTITUTING MEMBER OF SEMICONDUCTOR MANUFACTURING APPARATUS

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PROBLEM TO BE SOLVED : To provide a ceramic material having both corrosion resistance (plasma resistance) and mechanical strength. SOLUTION : Composite ceramics have three phases, MgO, YAP (YAlO3) and spinel (MgAl2O4). The composite ceramics have plasma resistance which is higher than alumina and is in the same level as MgO. A mechanical characteristic such as hardness or bending strength of the composite ceramics is in the same level as or superior to Al2O3. A material price and a production cost are lower than rare earth oxides. Further, an electrical resistivity can be lowered by adding conductive particles. The composite ceramics are suitable to be used especially for a constituting member of a semiconductor manufacturing apparatus. COPYRIGHT : (C)2014, JPO&INPIT