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TARGET FOR FORMING SUPERCONDUCTING THIN FILM AND METHOD FOR PRODUCING THE SAME

2025-06-17 18:591190下载
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PROBLEM TO BE SOLVED : To provide a target for forming a superconducting thin film which does not easily cause cracks and scattering of fine powders and a liquid phase in a deposition process by a PLD method and can form a superconducting thin film with excellent surface nature and superconducting characteristics, and to provide a method for producing the same.SOLUTION : A target for forming a superconducting thin film includes a superconducting sintered body of a rare earth oxide represented by REBaCuO(RE is at least one element selected from rare earth elements), and includes a sintered body of a consolidated body of a powder material including a RE compound, a Ba compound, and a Cu compound. The target is a sintered body comprising a particle whose median diameter is 20-100 μm.


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