Rare earth oxide film forming method

文件类型：PDF文档
文件大小：29K
PROBLEM TO BE SOLVED : To provide a method for easily obtaining a rare earth oxide coating film to be used for the corrosion-resistant film of an inner wall of a plasma etching chamber, the coating film of an inner surface of a glass bulb of a fluorescent lamp, or the like as a dense and smooth coating film. ?SOLUTION : The rare earth oxide coating film is obtained by heating and melting organic complex of rare earth elements having the non-degradable melting point such as 8-quinolinol, β-diketones and aromatic carboxylic acid as ligand under the atmosphere substantially not containing any steam or substantially not containing any oxygen, a coating film is formed of the molten liquid, and the coating film is heated and subjected to the oxidative decomposition. ?COPYRIGHT : (C)2009, JPO&INPIT ?