VACUUM RECYCLING APPARATUS AND METHOD FOR REFINING SOLAR GRADE POLYSILICON

文件类型：PDF文档
文件大小：76K
PROBLEM TO BE SOLVED : To provide a vacuum recycling apparatus and a method for refining solar grade polysilicon, capable of producing directly a polysilicon solution having a prescribed concentration, and shortening greatly the time and cost required for production of polysilicon. SOLUTION : This apparatus includes a vacuum degassing furnace and a circulation method vacuum processing furnace. A vacuum degassing furnace includes a vacuum chamber, a silicon storage part and a rare gas intake device. Among them, the vacuum chamber includes a first vacuum nozzle and a coupling hole. The silicon storage part is provided in the vacuum chamber, and arranged under the coupling hole. The rare gas intake device is provided in the silicon storage part. The circulation method vacuum processing furnace includes a second vacuum nozzle and a single nozzle communicating tube, and the single nozzle communicating tube is inserted into the silicon storage part via the coupling hole. COPYRIGHT : (C)2013, JPO&INPIT