Yttrium oxide material and member for semiconductor manufacturing equipment

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PROBLEM TO BE SOLVED : To improve workability of a yttrium oxide material, and further, to improve its wear resistance. SOLUTION : An electrostatic chuck 20 is composed of a yttrium oxide material in which, provided that fracture toughness is defined as KIC(MPa m1/2) and Vickers hardness in the weighting of 9.8 N is defined as Hv (GPa), Vickers hardness Hv is ≥10 GPa, and KIC/Hv lies in the preferable range of ≥0.15. Provided that the yttrium oxide is defined as a first phase as a base material, a second phase other than the first phase is preferably comprised by 5 to 20 vol.%. The second phase can be a compound showing a Vickers hardness Hv of ≥12 GPa in the weighting of 9.8 N, e.g., a nitride or a carbide. Alternatively, the second phase can be an oxide in which a solid solution limit is present in ≥5 mol% to yttrium oxide or a compound between the oxide and yttrium oxide, e.g., a rare earth oxide. COPYRIGHT : (C)2010, JPO&INPIT