Rare-earth oxide-alumina ceramics having excellent plasma erosion resistance and manufacturing metho

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PURPOSE : A rare earth oxide-alumina based ceramic with plasma resistance and excellent mechanical strength and a manufacturing method thereof are provided to obtain a ceramic which has phase stability and an excellent plasma-proof property.CONSTITUTION : A rare earth oxide-alumina based ceramics with plasma resistance is rare earth oxide-alumina based ceramic with a composition of A3Al5O12. A site is composed of GdxY1-x(0[Reference numerals] (AA) Strength AuCOPYRIGHT KIPO 2013