Anisotropic rare earth-iron magnets film and a manufacturing method of a miniature motor

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PROBLEM TO BE SOLVED : To provide a rare earth magnet film of 50 to 300 μm film thickness which is required for putting a micro motor and actuator of a mm size or less into practical use and which is capable of generating a strong static magnetic field in a gap between a stator and itself. SOLUTION : A heat source is arranged in a space between a target and a substrate to indirectly heat the substrate from a depositing side to deposit 4f rare earth/iron-based alloy on the substrate by pulse laser deposition (PLD) to make an anisotropic magnet film of Mmax⊥/Mmax//>0.90 when designating the inplane direction maximum magnetization of the film is denoted as Mmax// and vertical direction maximum magnetization as Mmax⊥. In addition, a motor moving member is made with the film. COPYRIGHT : (C)2006, JPO&NCIPI