METHOD FOR MANUFACTURING SUBSTRATE

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PROBLEM TO BE SOLVED : To provide a method for manufacturing a substrate, capable of suppressing generation of voids, enhancing its joint strength, and reducing its manufacturing cost. SOLUTION : A method for manufacturing a substrate 10 is a method for manufacturing the substrate 10 made by joining a first substrate 1 and a second substrate 2 and includes the following steps : the first substrate 1 having one surface 1a irradiated with a rare gas plasma and the second substrate 2 having one surface 2a irradiated with an oxygen plasma are prepared; and the one surface 1a of first substrate 1 and the one surface 2a of the second substrate 2 are made to face each other, and the first substrate 1 and the second substrate 2 are pasted together in the atmosphere to be temporarily joined. The first substrate 1 and the second substrate 2, which are in the temporarily joined state, are joined by heating. COPYRIGHT : (C)2012, JPO&INPIT