AMOPHOROUS PLASMA-RESISTANT GLASS COMPOSITION AND PLASMA-RESISTANT MEMBER USING THE SAME

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PURPOSE : An amorphous plasma-resistant glass composition and a plasma-resistant material using thereof are provided to include oxide of rare earth metal in SiO2-Al2O3 based glass formation, thereby displaying light-transmissive property similar to quartz and increasing resistance against plasma etching. CONSTITUTION : An amorphous plasma-resistant glass composition comprises 10-80 mol%% of SiO2, 15-40 mol%% of Al2O3, alkaline earth oxide, rare earth metal, and more than 0 mol%% and less than 30 mol%% of oxide which is selected from a combination thereof. The oxide of the rare earth metal includes oxide of Lanthanum group metal elements. The amorphous plasma-resistant glass composition has permeability greater than 80%% based on visible ray. The amorphous plasma-resistant member is formed by using the amorphous plasma-resistant glass composition. The plasma-resistant member is a window glass for plasma chamber. A manufacturing method of the amorphous plasma-resistant member comprises a step of coating the amorphous plasma-resistant glass composition on one of alumina, quartz and metal substrates. COPYRIGHT KIPO 2012