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The present invention relates to a process of measurement with spectrometry of glow discharge of a solid sample including/understanding at least an organic layer of material, the aforementioned process including/understanding the following stages : one places the aforementioned sample in a luminescent gas-discharge lamp; one injects into the gas-discharge lamp a gas mixture including/understanding at least a rare gas and gas oxygen, the gas oxygen concentration lying between 1% and mass 10% gas mixture; one applies an electric shock of the radio frequency type to the electrodes of the aforesaid the gas-discharge lamp to generate a plasma of glow discharge; one exposes the aforementioned layer of organic material to that plasma; one measures by means of a spectrometer at least a signal representative of an ionized species and/or an excited species of known as plasma.