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PROBLEM TO BE SOLVED : To provide a cathode body that has a boride film of rare earth element and can prevent interdiffusion of component elements between a substrate and the cathode body.
SOLUTION : The cathode body includes : a cylindrical cup 30 as a substrate; a barrier layer 303 that has SiC and is provided on the surface of the cylindrical cup 30; and a film that has boride of rare earth element and is provided on the surface of the barrier layer 303.
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