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Sensor module i.e. acceleration sensor, manufacturing method, for measuring e.g. acceleration, in

2025-06-18 18:512030下载
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The present invention relates to a method for the production of a sensor module for measuring acceleration, pressure or magnetic fields and the like. It comprises the steps of -arranging at least a micro-electromechanical element on a first integrated circuit, with a contact surface of a micro-electromechanical element -contacting at least one of said metallic support, in particular by means of wire bonding, -and in particular the wire bonding a-live at least of the integrated circuit, by means of at least one of the integrated circuit contact at least -rewiring layer., in particular with a contact surface.


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