WIRING FILM FOR DISPLAY WITH EXCELLENT WET ETCHING PROPERTY

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PROBLEM TO BE SOLVED : To provide a wiring film for a display excellent in wet etching property.SOLUTION : A wiring film for a display comprises a laminated structure of Mo alloy which includes at least one element selected from the group consisting of rare-earth-metal elements, Zn, Mg, and Ca in the range of 5 to 50 atomic % and pure Cu or Cu alloy.COPYRIGHT : (C)2012, JPO&INPIT