Magnesium oxide deposition material and its manufacturing method

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PURPOSE : A polycrystalline magnesium oxide material, its manufacturing method, and a method for manufacturing a magnesium oxide film are provided to form an oxide magnesium film where a rare earth metal is dispersed uniformly. CONSTITUTION : A polycrystalline magnesium oxide material comprises the polycrystal of magnesium oxide crystal particles having an average crystal diameter of 2.0 ~ 50 micrometers, wherein 0.005 ~ 0.060 mass% of a rare earth metal is dispersed in the magnesium oxide crystal particles. The rare earth metal is at least one kind of metal selected from the group consisting of Dy, Gd, Eu, Ho, Er, Tb, Yb, Tm and Lu. Preferably the rare earth metal is at least one kind of metal selected from the group consisting of Dy, Gd, Eu, Ho and Er.