SAFETY DEVICE FOR RARE GAS RECOVERY DEVICE

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PROBLEM TO BE SOLVED : To provide safety equipment to be stably operated without depending on operating pressure while maintaining the purity of recovered gas. SOLUTION : This safety device 1 for a rare gas recovery device includes : an outer cylinder 2 having an upper cylinder part 6 and a lower cylinder part 7 provided under the upper cylinder part 6, the upper cylinder part 6 and the lower cylinder part 7 being integrated with each other so that their inside spaces 6A, 7A are communicated with each other and kept in sealed conditions; a valve element 3 provided in the inside space 6A of the upper cylinder part 6 and closely attached to an upper end opening portion 7a of the lower cylinder part 7 with the dead weight to cut off the inside space 6A of the upper cylinder part 6 from the inside space 7A of the lower cylinder part 7; an energizing means 4 to be displaced in linkage with a volume change of a gas bag for energizing the valve element 3 upward to cancel the close attachment to the upper end opening portion 7a of the lower cylinder part 7; and an inner cylinder 5 having opening portions at both ends, the opening portion at one end being arranged in the state of passing through the outer cylinder 2 while keeping the outer cylinder 2 in the sealed condition and of being closely attached to the valve element 3, the opening at the other end being provided in the state of being open to the outside of the outer cylinder 2 so that part of the energizing means 4 can be stored in the inside space. COPYRIGHT : (C)2012, JPO&INPIT