ULTRAVIOLET RADIATION DEVICE

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PROBLEM TO BE SOLVED : To perform dimming of ultraviolet rays without changing an emission spectrum. SOLUTION : In a lamp house 11, an electrodeless lamp 12 is arranged in which rare gas and a discharge medium which can radiate ultraviolet rays based on a microwave through magnetrons 131 and 132 generating the microwave and waveguides 151 and 152 are enclosed. The ultraviolet rays radiated from the electrodeless lamp 12 perform condensation or diffusion with respect to an irradiated object using reflectors 231 and 232. In the lamp house 11, a radiation window 111 is formed from which the ultraviolet rays are radiated outside. In the radiation window 111, a first shutter 24 having a window 241 formed thereon, through which the ultraviolet rays pass, and a second shutter 25 having a window 251 formed thereon are arranged facing each other. The second shutter 25 is movable in a direction where openings 241 and 251 shift each other, and the dimming is performed by adjusting irradiance of the ultraviolet rays. COPYRIGHT : (C)2012, JPO&INPIT