RARE-EARTH-ELEMENT BORIDE MEMBER AND PROCESS FOR PRODUCING THE SAME

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PROBLEM TO BE SOLVED : To solve the following problem : a sintered compact of a rare-earth-element boride, in particular, LaB6 is unsuitable as a sputtering member or the like because pollutant is present therein in a large amount. SOLUTION : On the basis of a new view wherein contamination of a conventional LaB6 sintered compact is attributed to large amount of pores present in the sintered compact, a member with few contaminants can be formed by pressing an LaB6 compact in a hot press furnace and then subjecting to HIP treatment thereby reducing pores to attain a porosity of ≤7 vol.%, preferably ≤1 vol.%. COPYRIGHT : (C)2012, JPO&INPIT