NONCONTACT TYPE SEAL RING, AND SHAFT SEAL DEVICE USING THE SAME

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PROBLEM TO BE SOLVED : To provide a noncontact type seal ring of high reliability, which is reduced in deformation and maintains a constant flow rate. SOLUTION : This noncontact type seal ring 1 comprises a fixed ring 2 and a rotary ring 3, and is arranged to oppose respective end faces 2a, 3a via a clearance S supplied with a fluid F, the rotary ring 3 comprises a ceramic in which the content of silicon nitride is 81.8 mass% or more, the ceramic contains calcium oxide, aluminum oxide and an oxide of a rare earth element, the contents of the calcium oxide and the aluminum oxide are respectively 0.3 mass% or more to 1.5 mass% or less and 14.2 mass% or more to 48.8 mass% or less, with respect to 100 mass% of total of the calcium oxide, the aluminum oxide and the oxide of the rare earth element, the remainder thereof is the oxide of the rare earth element, and an average crystal grain size of the silicon nitride is 20 μm or less (excepting 0 μm), in the noncontact type seal ring 1. COPYRIGHT : (C)2011, JPO&INPIT