The hydrogen sensor and its manufacturing method

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PROBLEM TO BE SOLVED : To provide a hydrogen sensor used to detect leak of hydrogen gas used in a device such as an automotive fuel cell or a domestic fuel cell, or used to control hydrogen concentration in a device treating hydrogen gas, and a method for manufacturing the same. ŽSOLUTION : This hydrogen sensor comprises a substrate 2, a rare earth metal film 3 formed on the substrate 2, and a protective film 5 formed on the rare earth metal film 3, the protective film 6 including hydrogen-permeable metal particles 13 dispersed in a ceramic material 15. Preferably, the rare earth metal film 3 has a thickness of 5-1000 nm, and the protective film 5 has a thickness of 5-40 nm. ŽCOPYRIGHT : (C)2006, JPO&NCIPI Ž