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PURPOSE : A heat resistant coating member, a manufacturing method of the same and a processing method using the same are provided to improve durability and to prevent adherence by coating a material with a specific film including rare earth materials contained oxide.CONSTITUTION : A heat resistant coating member comprises an intermediate coating layer and a coating layer. The intermediate coating layer is made from metal, carbon or carbide, lanthanide oxide or Y, Zr, Al or Si element, or complex oxide. The coating layer comprises the complex oxide with the coating layer and 3B element.COPYRIGHT KIPO 2011