THE TRANSPATENT CONDUCTIVE PHOSPHORS THIN FILM AND THE MANUFACTURING METHOD THEREOF

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PURPOSE : A transparent conductive phosphors thin film and a manufacturing method thereof are provided to prevent deterioration and simplify a process by being applied to a field emission device and an inorganic luminescence element. CONSTITUTION : A transparent conductive phosphor thin film(110) is formed by using a sputtering target. The sputtering target comprises zinc oxide, tin oxide, metal zinc, rare earths element, color-development metal, and a conductive metal. The conductive metal is the gallium.