ALUMINUM NITRIDE-BASED COMPOSITE MATERIAL, METHOD FOR MANUFACTURING THE SAME AND MEMBER FOR SEMICON

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PROBLEM TO BE SOLVED : To provide a new material which is comparable to alumina in terms of corrosion resistant performance and volume resistivity and is more excellent in heat conductivity than alumina. SOLUTION : An aluminum nitride-based composite material is highly pure with respective content ratios of transition metals, alkali metals and boron as low as 1, 000 ppm or lower, has AlN(aluminum-nitride) and MgO as constitutional phases and additionally contains at least one selected from a group consisting of a rare earth metal oxide, a rare earth metal-aluminum complex oxide, an alkali earth metal-aluminum complex oxide, a rare earth metal oxyfluoride, calcium oxide and calcium fluoride, wherein the heat conductivity is in a range of 40 to 150 W/mK, a thermal expansion coefficient is in a range of 7.3 to 8.4 ppm/°C and the volume resistivity is 1×1014 Ωcm or more. COPYRIGHT : (C)2011, JPO&INPIT