Conductive silicon nitride material and its manufacturing method

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PROBLEM TO BE SOLVED : To provide a conductive silicon nitride sintered compact having excellent strength and fracture toughness. SOLUTION : The silicon nitride sintered compact contains 0.2-5 wt.% nitride particle of titanium family elements having ≤0.1 μm major axis diameter, 2-20 wt.% grain boundary phase mainly containing an Si-R-Al-O-N compound (R expresses rare earth element) and the balance being silicon nitride and externally contains 0.3-12 wt.% CNT. The wear resistant member comprises the silicon nitride sintered compact and is useful as a wear resistant member. COPYRIGHT : (C)2006, JPO&NCIPI