分享好友 知识库首页 频道列表

FLUORINATED RARE EARTH OXIDE ALD COATING FOR CHAMBER PRODUCTIVITY ENHANCEMENT

2025-06-20 13:311450下载
文件类型：PDF文档
文件大小：2082K
An article comprises a body having a coating. The coating comprises a M-O-F coating having a molar O/F ratio that is customized to future processing that the article may be exposed to.


请登录查看


反对 0
举报 0
收藏 0
打赏 0
评论 0