Excimer discharge lamp

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PROBLEM TO BE SOLVED : To provide an excimer discharge lamp having a longer optical output decay period. SOLUTION : The excimer discharge lamp includes a discharge container having a metal-brazed sealing structure, the discharge container being filled with rare gas and gas containing fluorine (F) atoms, wherein at least a pair of external electrodes are arranged outside the discharge container while opposing each other across the discharge container. The sealing structure has a metal member and metal brazing material. A relation of D≥8×105/P is satisfied where D (mm) is a shortest clearance between the end of a discharge region in the discharge container and the metal member or the metal brazing material whichever closer to the end of the discharge region in the discharge container, and P (Pa) is total pressure in the discharge container filled with of the gas. COPYRIGHT : (C)2010, JPO&INPIT