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PROBLEM TO BE SOLVED : To provide an inexpensive device capable of generating ultraviolet-beam with a wave length of 254 nm. ŽSOLUTION : Rare gas 6 and mercury 7 are enclosed in an oblong ceramic tube 1 having quartz plates 2a, 2b mounted on both sides thereof. The ultraviolet-beam UV2 with a wave length of 254 nm having small spreading angle is generated by generating high frequency discharge between cylindrical electrodes 8a, 8b arranged on both end part of the ceramic tube. ŽCOPYRIGHT : (C)2006, JPO&NCIPI Ž