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TARGET MATERIAL OF COMPOSITE TUNGSTEN OXIDE, AND METHOD FOR MANUFACTURING THE SAME

2026-04-07 04:434620下载
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PROBLEM TO BE SOLVED : To provide a target material of a composite tungsten oxide, which is used for forming a thin film of the composite tungsten oxide with a dry method, and to provide a method for manufacturing the same. SOLUTION : This manufacturing method includes : preparing a powder of the composite tungsten oxide which has a composition expressed by general formula : MxWyOz (wherein M represents at least one element selected from H, He, alkali metals, alkaline earth metals, rare-earth elements, Mg, Zr, Cr, Mn, Fe, Ru, Co, Rh, Ir, Ni, Pd, Pt, Cu, Ag, Au, Zn, Cd, Al, Ga, In, Tl, Si, Ge, Sn, Pb, Sb, B, F, P, S, Se, Br, Te, Ti, Nb, V, Mo, Ta, Re, Be, Hf, Os, Bi and I; and x, y and z satisfy 0.001≤x/y≤1 and 2.0
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