The control device of the filament, the filament utilization processor and control method

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PROBLEM TO BE SOLVED : To stably control quantity of thermion emitted from a filament in high precision. ŽSOLUTION : A filament controller 10 comprises a resistance measuring means 1 to measure resistance value of a filament 5, an average resistance value computing unit 2 to compute the average resistance value Rave in a first period, a current target value computing unit 3 to compute the current target value Iref to be supplied to the filament 5 based on the average resistance value Rave and power target value Wref, a constant current power source 4 to control the current value flowing through the filament 5 so that it may match the current target value Iref in a second period after the first period, and a timing control circuit 6 to control timing of the first period and the second period. ŽCOPYRIGHT : (C)2007, JPO&INPIT Ž