Aluminum nitride sintered body and member for semiconductor manufacturing equipment

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PROBLEM TO BE SOLVED : To provide an aluminium nitride sintered compact which contains aluminium nitride particles difficult to degranulate, shows strong resistance of 10 Ω.cm or more at a high temperature zone of for example 300-500 deg.C and has a relatively high thermal conductivity. SOLUTION : The aluminium nitride sintered compact contains aluminium nitride as a main component, rare-earth metals converted to oxides of 0.4 mol% or more and 2.0 mol% or less, alumina of 0.5 mol% or more and 2.0 mol% or less and Si of 80 ppm or less while an average diameter of aluminium nitride particles is 3 μm or less.