CAPACITOR STRUCTURE

文件类型：PDF文档
文件大小：295K
A capacitor structure includes : a top electrode, a bottom electrode, a first capacitor dielectric layer positioned between the top electrode and the bottom electrode and a second capacitor dielectric layer positioned between the top electrode and the bottom electrode. The first capacitor dielectric layer is selected from the group consisting HfO2, ZrO2, and TiO2. The second capacitor dielectric layer is selected from the group consisting of lanthanide oxide series and rare earth oxide series.