CERIUM-BASED ABRASIVE MATERIAL CONTAINING FLUORINE AND SULFUR

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PROBLEM TO BE SOLVED : To provide a cerium-based abrasive material containing fluorine and sulfur, capable of maintaining a stable abrasion rate for a long period of time. SOLUTION : This cerium-based abrasive material includes 1.0 to 10.0 mass% fluorine-containing compound in terms of fluorine amount, 0.05 to 3.0 mass% sulfur-containing compound in terms of sulfur amount, and 40 to 95 mass% CeO2/TREO (total rare earth metal oxide). When the BET specific surface area is A m2/g, and the median diameter based on volume measured by a laser diffraction-scattering method is D μm, A is 1.0 to 20 and A×D is 2.5 to 18. COPYRIGHT : (C)2010, JPO&INPIT