SPUTTERING TARGET FOR OPTICAL MEDIUM, METHOD OF MANUFACTURING THE SAME, AND OPTICAL MEDIUM AND MET

文件类型：PDF文档
文件大小：172K
PROBLEM TO BE SOLVED : To provide a sputtering target for optical media which includes relatively inexpensive aluminum as a principle component, in which no rare earth metal is used, and which is excellent in surface smoothness, a method of manufacturing the same, and an optical medium and a method of manufacturing the same. SOLUTION : The sputtering target for the optical media includes Al as a principal component includes 1-10 atom% of one or two elements selected from the group including Ta and Nb and 0.1-10 atom% of Ag. The optical medium 100 includes : a substrate 10; and reflective layers 20A, 20B provided on the substrate 10, and each having a composition including Al as a principal component, 1-10 atom% of one or two types of elements selected from the group including Ta and Nb, and 0.1-10 atom% of Ag. COPYRIGHT : (C)2010, JPO&INPIT