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REFLECTIVE FILM FOR OPTICAL INFORMATION RECORDING MEDIUM AND SPUTTERING TARGET FOR FORMING REFLECTIV

2025-06-21 08:504890下载
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PROBLEM TO BE SOLVED : To provide an Al-based alloy reflective film of which the reflective film surface reproduces a groove, a pit, etc. formed on a substrate with high accuracy so as to reduce the noise of the optical information recording medium and which has high reflectance, and to provide a sputtering target which is useful for forming such a reflective film. SOLUTION : The reflective film for the optical information recording medium is used for the optical information recording medium, wherein the reflective film is composed of the Al-based alloy containing rare earth elements of 2.0 to 15.0%, and a crystallite has a size of 30 nm or smaller in the thickness direction of the reflective film. COPYRIGHT : (C)2010, JPO&INPIT


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