ELECTROMAGNETIC DRIVE TYPE ACTUATOR AND METHOD OF MANUFACTURING SAME

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PROBLEM TO BE SOLVED : To provide a moving magnet type electromagnetic drive actuator which enables large displacement of a mover.SOLUTION : An electromagnetic drive actuator includes : a fixed part 2; the mover 1; one or a plurality of flexible supporting parts 3 that support the mover 1 being connected to the fixed part 2; a permanent magnet 4 formed on the mover 1; and a coil 5 that generates a magnet field around the permanent magnet 4. The mover 1 is displaced by the magnetic field generated by the coil 5. The mover 1 and the supporting part 3 are integrally formed with a silicon nitride film, and the permanent magnet 4 is a film-like permanent magnet having a multilayer film structure formed by alternatively stacking RE2, Fe14B and M. However, RE is any one of rare earth metal elements, and M is at least one out of Ta, Ti, Nb, Zr and Mo.COPYRIGHT : (C)2010, JPO&INPIT