THERMIONIC ELECTRON EMISSION CATHODE

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PROBLEM TO BE SOLVED : To provide a thermionic electron emission cathode in which by suppressing reaction consumption with the passage of time at a cathode tip holding part in a conventional thermionic electron emission cathode, remarkably stable electron beam characteristics are maintained over a long time with high reliability, and which is high in utilization effect as an electron microscope and an electron beam exposure device.SOLUTION : This thermionic electron emission cathode has a cathode tip composed of a rare-earth hexaboride and a heater composed of a carbonaceous material for holding and heating the cathode tip. A thermionic electron emission source is provided in which a U-shaped support piece consisting of a high melting-point metal thin plate is sintered and adhered via a reaction barrier layer along a side face opposed to the cathode tip base part, and in which via a face opposed to the support piece, the cathode is held by the heater.COPYRIGHT : (C)2010, JPO&INPIT