METHOD FOR PRODUCING POLYMER FOR PHOTORESIST

文件类型：PDF文档
文件大小：76K
PROBLEM TO BE SOLVED : To provide a high-productivity method, by which contamination by impurities (a foreign metal and a metal constituent in particular) can be sufficiently reduced in a production process, for producing a polymer with a maximally reduced impurity content for a photoresist. SOLUTION : The method for producing a polymer for a photoresist includes a process for feeding a liquid material by a plurality of nonmetal lining pipes. In the joint part between the nonmetal lining pipes, an earth material is inserted so as to be brought into contact with the liquid material to be supplied, and the liquid material is supplied while grounding the earth material. COPYRIGHT : (C)2010, JPO&INPIT