METHOD OF CLEANING PARTICLE BY ATMOSPHERIC-PRESSURE PLASMA

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PROBLEM TO BE SOLVED : To provide a device for removing, cleaning and recovering efficiently contaminated particles. SOLUTION : A contaminated particle-rare gas stream is introduced into an atmospheric-pressure plasma space through nozzles 2a and 2b having an angle to electrodes 1a and 1b, and collided with insulators 5a and 5b installed between the electrodes or between the electrode and the nozzle to remove contaminated materials from the particle 6 surfaces, or to collide particles in an aggregational state of secondary particles and convert them into a primary particle state and remove and clean the contaminated materials of the particle surfaces. The contaminated materials of the particle surfaces are again removed and cleaned with the atmospheric-pressure plasma by the rare gas stream from the nozzle installed in the rear to improve the cleaning effects, and to efficiently recover the particles. COPYRIGHT : (C)2010, JPO&INPIT