OXIDE SUPERCONDUCTIVE TARGET FOR LASER VAPOR DEPOSITION

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PROBLEM TO BE SOLVED : To provide an oxide superconductive target for laser vapor deposition where, in an oxide target used for a laser vapor deposition system, the extension of the crack of a target caused by high laser output and a high temperature atmosphere is prevented, and stable film deposition can be performed for a long time. SOLUTION : Regarding the oxide superconductive target for laser vapor deposition, in an oxide target used for a laser vapor deposition system where a target is irradiated with a laser beam, so as to generate the particulates of an oxide from the surface of the target, and the particulates are deposited on the surface of a base material, so as to deposit an oxide film on the surface of the base material, it is characterized in that a silver net is disposed in a target body obtained by : mixing a rare-earth oxide powder, barium carbonate powder, and copper oxide powder at a predetermined composition ratio to obtain a mixed powder; press-molding the mixed powder to form a compressed-molded compact; and performing a partial melt molding to the compressed-molded compact. COPYRIGHT : (C)2009, JPO&INPIT