Oxide superconductive target for laser vapor deposition and method of manufacturing the same

文件类型：PDF文档
文件大小：210K
A method of manufacturing an oxide superconductive target for a laser vapor deposition, which is used when an oxide film is formed in a laser vapor deposition system including the steps of : mixing rare-earth oxide powder, barium carbonate powder, and copper oxide powder at a predetermined composition ratio to obtain a mixed powder; press-molding the mixed powder to form a compressed-molded compact; and performing a partial melt molding the compressed-molded compact. An oxide superconductive target for a laser vapour deposition, which is used when an oxide film is formed in a laser vapour deposition system, comprising a target main body, the elemental ratio of the target main body being substantially Y : Ba : Cu=1 : 2 : 3; and a silver net is disposed in a position in the range of 10% to 40% of the target thickness form the bottom of the target main body.