OXIDE SUPERCONDUCTIVE TARGET FOR LASER VAPOR DEPOSITION AND METHOD OF MANUFACTURING THE SAME

文件类型：PDF文档
文件大小：427K
A method of manufacturing an oxide superconductive target for a laser vapor deposition, which is used when an oxide film is formed in a laser vapor deposition system including the steps of : mixing rare-earth oxide powder, barium carbonate powder, and copper oxide powder at a predetermined composition ratio to obtain a mixed powder; press-molding the mixed powder to form a compressed-molded, compact; and performing a partial melt molding the compressed-molded compact.