METHOD FOR FORMING INSULATING FILM, COMPUTER READABLE STORAGE MEDIUM, AND PROCESSING SYSTEM

文件类型：PDF文档
文件大小：154K
PROBLEM TO BE SOLVED : To provide a method for forming an insulating film which forms an insulating film having a thickness equivalent to that in conventional CVD and good film quality under low temperature. SOLUTION : A CVD step (step S2) for depositing a silicon oxide film as an insulating film on a silicon layer by CVD, and a plasma modification step (step S4) for modifying the silicon oxide film by plasma generated under pressure conditions in the range of 6.7-267 Pa using processing gas containing rare gas and oxygen are carried out until the silicon oxide film reaches a desired film thickness. COPYRIGHT : (C)2009, JPO&INPIT