WIRE AND ELECTRODE OF EXCELLENT ADHESIVENESS FOR LIQUID CRYSTAL DISPLAY

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PROBLEM TO BE SOLVED : To provide a copper alloy thin film of excellent adhesiveness for forming a wire and an electrode for a liquid crystal display. SOLUTION : This wire/electrode comprises the copper alloy thin film having -200 to 100 MPa of residual stress and comprising a composition containing 0.01-1 atomic% as total of one kind, two kinds or more selected from the group comprising Ag, Ca, Mg and Zn, further containing 0.1-2 atomic% of oxygen, further containing 0.01-1 atomic% as total of one kind, two kinds or more selected from rare earth elements, when required, and containing a residual part comprising Cu and inevitable impurities. COPYRIGHT : (C)2009, JPO&INPIT