NANOPOWDER USING A RF PLASMA COMBUSTION AND METHOD OF MANUFACTURING THEREOF

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PURPOSE : Nanopowder using a plasma combustion device and a manufacturing method thereof are provided to supply proper heat energy to a precursor by locating a powder injecting nozzle 0.1-3cm away from a central part of an induction coil.CONSTITUTION : A method for manufacturing nanopowder comprises the following steps of : preparing magnesium oxide powder(MgO) with 10μm-100μm of diameter and rare-earth-metal oxide powder(201); mixing the prepared magnesium oxide powder and rare-earth-metal oxide powder mechanically(203); injecting the mixed powder together with a carrier gas into an RF plasma combustion device; supplying a central gas and shielding gas to the RF plasma combustion device(213); and supplying a quenching gas to the RF plasma combustion device(215).© KIPO 2009