A manufacturing method of a protective film for FPD

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PROBLEM TO BE SOLVED : To prevent MgO or the like of a film body from changing to MgCO3, Mg(OH)2or the like harmful to an FPD by reacting with CO2gas or H2O gas in the air. SOLUTION : This manufacturing method of a protective film for an FPD has : a process for forming, on a surface of a substrate, a film body formed of any of MgO, CaO, SrO, BaO, an alkaline earth composite oxide or a rare earth oxide, or a composite oxide of alkaline earth oxide and a rare earth oxide; and a process for forming a fluoride layer on a surface of the film body by surface-treating the film body by a fluorine plasma. COPYRIGHT : (C)2005, JPO&NCIPI