Ceramic heater

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PROBLEM TO BE SOLVED : To provide a ceramic heater in which a difference of thermal expansion coefficients of a heater member and an exothermic body is made small, and cracks or breakage of the heater member is suppressed. SOLUTION : In the ceramic heater 1 in which an exothermic body of which main components are silicide of Mo or W, nitride, and carbide is embedded into the heater member 21, the heater member 21 has silicon nitride as the main component and it contains rare earth elements, Cr compound, and a compound composed of 5-10 vol% of Cr and W of which particle diameters are less than 3 μm. COPYRIGHT : (C)2005, JPO&NCIPI