MANUFACTURING METHOD OF VALVE METAL COMPOSITE ELECTRODE FOIL

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PROBLEM TO BE SOLVED : To provide an inexpensive electrode foil for an electrolytic capacitor which is suitable for manufacture of a laminated solid electrolytic capacitor, has capacitance density higher than that of an etching Al foil and the electrode resistance same as that of the etching Al foil, and contains reduced quantity of Ta and Nb as expensive rare metals, and to provide a manufacturing method thereof. SOLUTION : A valve metal dense layer (6) is formed on a substrate (10). An alloy thin film (7b) in which the valve metal and a heterocomponent imcompatible with the valve metal are uniformly distributed with a particle size of 1 nm-1 μm is formed on the obtained dense layer (6). The valve metal and the heterocomponent are particle-adjusted by vacuum heat treatment and peeled from the substrate (10) and the heterocomponent is removed by solving, thereby forming an electric collector layer (5) on the dense layer (6) side. An execution order of the particle adjustment and the peeling can be changed and an order of the formation of the electric collector layer and the removing of the heterocomponent by dissolving can be changed. COPYRIGHT : (C)2008, JPO&INPIT