SUBSTRATE SUPPORT HAVING PROTECTION LAYER FOR PLASMA-RESISTANT PROPERTY

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PROBLEM TO BE SOLVED : To provide a substrate support assembly having a protection layer for increasing plasma resistant property. SOLUTION : The substrate support assembly includes an electrostatic chuck having an upper substrate support face, and a protection layer disposed on the electrostatic chuck. The protection layer is formed of a ceramic material containing a rare earth metal. COPYRIGHT : (C)2008, JPO&INPIT