BULB METAL COMPOSITE ELECTRODE FOIL AND ITS MANUFACTURING METHOD

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PROBLEM TO BE SOLVED : To provide electrode foil for inexpensive electrolytic capacitor and its manufacturing method suitable for the manufacture of laminated solid state electrolytic capacitor, having a capacity density higher than that of etching aluminum foil, and further, having electrode resistance same as that of the etching aluminum foil and reduced in the using amount of Ta or Nb which is expensive rare metal.SOLUTION : The precise layer (6) of Ta or Ta alloy is formed on the substrate (5) of aluminum foil or aluminum alloy foil. An alloy thin film is formed in which Ta and a constituent having different phase incompatible with Ta is distributed uniformly with a grain diameter of 1 nm-1 μm on the obtained precise layer (6). Then vacuum heat treatment is applied whereby the different phase constituent is molted and removed after the grain of the different phase constituent is regulated to form a porous layer (7) of Ta. In another case, Nb is employed instead of Ta.COPYRIGHT : (C)2008, JPO&INPIT