ALUMINUM NITRIDE-BASED POWDER AND METHOD FOR PRODUCING THE SAME

文件类型：PDF文档
文件大小：165K
PROBLEM TO BE SOLVED : To provide an aluminum nitride-based powder which hardly causes aggregation in the sintering step even without using boron nitride as a raw material. SOLUTION : There is provided an aluminum nitride-based powder containing oxygen and a rare earth element, wherein the aluminum nitride-based powder has an apparent density of 3.2 g/cm3 or more, the content of the oxygen is 0.01 to 1 mass% in 100 mass% of the aluminum nitride-based powder and the mass ratio (MR/MO) of the content (MR) of the rare earth element to the content (MO) of the oxygen is 0.1 to 1.5. SELECTED DRAWING : None COPYRIGHT : (C)2019, JPO&INPIT